Services

Modification Relocation
System Control PC to PLC Modification
Chemical Bath Auto Concentration System Modification
Wet Station Flow Rate Control System Modification
Wet Station HMI SYSTEM H/W & OS Version Upgrade
Wet Station Dryer Control System & Software Interface Modification
Wet Station Moving Robot Control System Scheduling Modification
LD Flat Zone Align 각도 추가로 Etch Rate Uniformity Modification
Spin Scrubber wafer Count up Start & Wafer Check
Spin Scrubber Nano Spray Nozzle Modification
Moving Arm Safety Wire Modification
Wet Station System Leak Repair Modification
PFA Tube Line Welding Tube Modification
Chemical Circulation Unit Produce
Motor & Drive Upgrade Modification